Axcelis acquired Fusion Systems Corporation in August 1997.
Fusion is a leading worldwide supplier of single-wafer ashers and photostabilizers used in the fabrication of advanced semi- conductor devices.

AXCELIS / FUSION M 150PC is a Photostabilizers system. the FUSION M 150PC can be used with 6” wafer size.
Microlite 150 series photostabilizer systems provide a clean one-step process for hardening of photoresists at high production throughputs. 

AXCELIS / FUSION

M150PC

M150PCU

The Fusion M200PC is a photostabilizer used in the semiconductor industry. It uses a special process to harden and impact high-temperature stability to photoresist materials on semiconductor wafers. Photostabilized wafers are capable of withstanding high temperature hard baking.

M200PC

M150

300mm/200mm photostabilization system for photoresist curing. Low-k curing and non-volatile memory charge erasure.

FUSION PS3

RAPIDCURE 320FC

 110000800

The Fusion m200pcu is a Photostabilizer System made by Fusion Systems. It utilizes the standard dual unicassette wafer handling platform. The Fusion m200pcu is a single chamber DUV Photostabilizer with a wafer size of 8" or 6". It has shielded SECS cables and is used for UV Bake process applications. The irradiator contains an Hg High Intensity Lamp and 2.45 GHz magnetrons.

M200PCU

M200 ACU

AXCELIS / FUSION 200 PCU is a Photostabilizers system. The 200 PCU can produce wafer size of 8”.

200 PCU

MICROLITE

The Fusion Gemini GPS is a UV Cure System made by Axcelis / Fusion. It has two 8" open cassette stations and a process chamber mWave PS: HV-SMPS. The system software (OS) is WinNT 4.0 SP 6 and the system software (App) is version 3.43.

GEMINI  GPS

The Fusion Gemini PCU is a photostabilizer used for advanced device manufacturing. It preserves CDs and boosts the performance of etch and implant processes.

AXCELIS / FUSION

개요

활성 등재물

총 제품 수

서비스

상위 AXCELIS / FUSION Photostabilizers

M150PC

8 등재물

M150PCU

3 등재물

M200PC

3 등재물

RAPIDCURE 320FC

2 등재물

Moov에 등재하고 즉시 완벽한 구매자를 찾으십시오.

모든 AXCELIS / FUSION Photostabilizers