Veeco Instruments Inc. a global leader of advanced thin film etch and deposition process equipment, acquired Ultratech, Inc. a leading supplier of lithography, laser-processing and inspection systems used to manufacture semiconductor devices and LEDs.


"The Saturn Spectrum 3e features an improved machine vision system (MVS), with the addition of the PatMAX architecture. The Saturn Spectrum 3e also features improved illumination, providing an increased wafer plane irradiance of 1900 mW/cm2, resulting in decreased exposure times"

VEECO / ULTRATECH

SATURN SPECTRUM 3e

The 4700 model provides manufacturers the ability to print rowbars with a single exposure. This process enhances both yields and magnetic recording head performance. Rowbars are structures in read/write heads of hard drives. The ability to print these with a single exposure can significantly speed up the manufacturing process and improve the quality of the end product. This model represent advanced tools in the field of semiconductor and microdevice manufacturing, offering increased efficiency and precision. This is used in industries where microfabrication is key, such as in the production of microprocessors, memory chips, and hard drives.

4700

ULTRATECH 1500 is a steppers and scanners system. the Ultratech 1500 can be used with 2”-6” wafer size.
1.0, 0.8

1500

The ULTRATECH Saturn Spectrum 3 is a Steppers and Scanners system. The Saturn Spectrum 3 can produce wafer size of 4”-8”.

SATURN SPECTRUM 3

The Saturn Spectrum 300 is the Company's first product offering to support 300mm bump manufacturing. All of these bump steppers provide broadband (g, h and i-line) exposure, and are used in conjunction with electroplating to produce a pattern of bumps, or metal connections, on the bond pads of the die for flip chip devices.

SATURN SPECTRUM 300

High-brightness light emitting diodes (HBLED), semiconductor fabrication, and nanotechnology applications; and AP series for advanced packaging applications.

SAPPHIRE 100E

The model 2244i and Saturn Wafer Stepper feature an i-line illumination specification that is designed to make them compatible with advanced i-line reduction steppers.

2244i

The ULTRATECH AP300 is a Steppers and Scanners system. The AP300 can produce wafer size of 200–300mm.
The AP200/300 family of lithography systems is built on Veeco’s customizable Unity Platform™, delivering superior overlay, resolution and side wall profile performance and enabling highly-automated and cost- effective manufacturing. These systems are particularly well suited for copper pillar, fan-out, through-silicon via (TSV) and silicon interposer applications. In addition, the platform has numerous application-specific product features to enable next-generation packaging techniques, such as enhanced warped wafer handling, dual side alignment and Optical focus.

AP300

The Sapphire 100 is also based on the 1000 Series platform, with additional features developed specifically for HBLED lithography applications. HBLED manufacturing requires special substrate handling capabilities for the small diameter sapphire and silicon carbide substrates used to manufacture the LED devices for display backlighting and general lighting applications. For HBLED applications, we believe our Sapphire 100 stepper offers depth of focus, productivity and yield improvement advantages over competitive product offerings.


SAPPHIRE 100

1000

Serves lithography process steps with device feature sizes above 0.8 micron. Handles wafer sizes from 75 mm to 200 mm. 

STAR 100

The UltraStep 1100 Wide Field 1:1 Projection Stepper System exposes reticle images in a step- and-repeat manner onto 3", 4", 5", and 6" wafers with fine line resolution ( 1.0um standard, 0.8um optional) and tight overlay accuracy.

1100

The Saturn Spectrum 300e2 is the Company's flagship product offering to support 300mm bump manufacturing. All of these bump steppers provide broadband (g, h and i-line) exposure, and are used in conjunction with electroplating to produce a pattern of bumps, or metal connections, on the bond pads of the die for flip chip devices.


SATURN SPECTRUM 300e2

Model 6700 extends the model 4700 capabilities into the submicron range by utilizing i-line exposure.

6700

TITAN I

XLS 7500

ULTRATECH 1500 MVS is Steppers and Scanners system. The 1500 MVS can be used with 5” wafer size.
1.0, 0.8

1500 MVS

TITAN II is Wafer Stepper machinery compatible for 4”-8” wafers.
gh-line
1.0

TITAN II

CGS-300

The AP300L targeted cost sensitive customers that do not need all of the advanced capabilities associated with our flagship product offering, such as the low end outsourced semiconductor assembly and test ("OSAT") market segment.

AP300L

The XLS 193nm (small field) system is a DUV tool used for advanced research and development semiconductor materials and processes.

XLS 193nm

The AP300W is a widefield tool designed for high volume applications.
ULTRATECH AP300W is Steppers and Scanners system. The AP300W can be used with a 200-300mm wafer size.


AP300W

The Mercury XLS 248 is a DUV (248nm) reduction stepper providing a minimum resolution of 0.25 microns for selected semiconductor applications requiring sub-0.35 micron resolution.

XLS 248

TITAN III

The Saturn or Titan stepper is used in conjunction with electroplating to produce a pattern of bumps, or metal connections, on the bond pads of the die for flip chip devices.

SATURN I

1900

SATURN 200

2700

The XLS 9800 and XLS 9900 provide i-line and DUV wavelength capabilities and are designed to meet TFH customers' requirements for shrinking geometries on their critical layers.

XLS 9900

The Prisma-ghi was developed as a lower cost, low volume/R&D bump stepper.

PRISMA-ghi

XLS 9800

TITAN 300

1700 ABS are used to expose the Air Bearing Surface (ABS) pattern.

1700 ABS

XLS 157nm (small and mid field) system is a DUV tool used for advanced research and development semiconductor materials and processes.

XLS 157nm

Reduction Stepper 
The XLS 7800 is a DUV version of the tool, utilizing a DUV wavelength of 248nm.

XLS 7800

SATURN 300

The ULTRATECH Saturn Spectrum 300E is a Steppers and Scanners system. It can produce wafer size of 12”.  It has some unique features such as Air probe focus detection, 3-Point focus detection, Linear motor XY stage, MVS Pattern recognition system, Vibration isolation system, Dual flip aperture broadband.

SATURN SPECTRUM 300e

TITAN 200

TITAN 4035

Also known as Ultratech Model 1700 MVS Machine Vision System

The Model 1700MVS is one of Ultratech's most sophisticated tools being used today in the industry for air bearing surface patterning applications. Incorporating an advanced machine vision system and customized software specifically designed for rowbar level processing, the 1700MVS recognizes and automatically aligns to preexisting features, thus eliminating the need for special targets The model 1700MVS is the world's most widely used thin film head (TFH) lithography tool for high-volume manufacturing. Design simplicity makes the 1700MVS a highly reliable, easy-tooperate, and easy-to-maintain system. Its low initial investment cost and low operating costs also enable it to provide tremendous cost-of-ownership benefits. 

1700

TITAN 4700

TITAN 1.2

The AP200/300 family of lithography systems delivers superior overlay, resolution and side wall profile performance and enabling highly-automated and cost- effective manufacturing. These systems are particularly well suited for copper pillar, fan-out, through-silicon via (TSV) and silicon interposer applications. In addition, the platform has numerous application-specific product features to enable next-generation packaging techniques, such as enhanced warped wafer handling, dual side alignment and Optical focus.

AP200

Mercury XLS 200 is an i-line reduction system with a minimum resolution of 0.35 microns, providing a high resolution i-line reduction stepper option for selected semiconductor markets.

XLS 200	

1600 DSA

2000GH

SATURN III

1000W

SATURN II

1100S

TITAN 1.1

Extends capabilities to much smaller submicron patterns used for pole trimming.
0.8mm

VEECO / ULTRATECH

개요

활성 등재물

총 제품 수

서비스

상위 VEECO / ULTRATECH Steppers and Scanners

SATURN SPECTRUM 3e

6 등재물

1500

5 등재물

SATURN SPECTRUM 3

5 등재물

SATURN SPECTRUM 300

5 등재물

Moov에 등재하고 즉시 완벽한 구매자를 찾으십시오.

모든 VEECO / ULTRATECH Steppers and Scanners