개요

The Dimension X3D is an Automated Atomic Force Microscope that provides nondestructive, gauge-capable, automated metrology with three-dimensional (X, Y, and Z) in-line characterization of critical dimension (CD) feature shape control. It is designed for critical level control in leading-edge device manufacturing and can gather detailed data on crucial CD elements. The X3D can scan on any material and its AFM technology enables unmatched resolution and repeatability.