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WOTAN

카테고리
AOI
개요

WOTAN is a fully automated, recipe-free, high-speed AOI tool for simultaneous front and back side inspection. It automatically detects macroscopic defects based on a wafer-to-wafer comparison. Key application is high throughput process monitoring and tool control . Easy-to-read instant result display options allow short correction cycles. WOTAN is available stand-alone and in combination with edge inspection modules (THOR).

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