개요

The FUSION GEMINI GPL MCU202 is a plasma asher used in semiconductor manufacturing processes. Its compact footprint measures approximately 1.14 meters x 1.6 meters (3.75 feet x 5.3 feet). The primary application for this system is bulk strip, which involves removing material layers from the surface of semiconductor wafers. The asher utilizes a downstream microwave plasma as the process source, allowing for efficient and controlled material removal during the strip process.