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S-9300
카테고리
CD-SEM개요
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.
활성 등재물
3
서비스
검사, 보험, 감정, 물류
