개요

Hitachi High-Technologies introduced the "CV6300 Series," an advanced successor to the CV5000 Series, designed for deep hole and trench measurements in 3D-NAND flash memory manufacturing, especially for structures with 96 layers and beyond. This high voltage CD-SEM system boasts a world-first 45kV acceleration voltage, offering high-resolution imaging and precise overlay measurements. With improved throughput and precision, the CV6300 Series aims to enhance semiconductor manufacturing productivity.