EV Group (EVG) is a leading supplier of high-volume production equipment and process solutions for the manufacture of semiconductors, MEMS, compound semiconductors, power devices and nanotechnology devices.
A recognized market and technology leader in wafer-level bonding and lithography for advanced packaging and nanotechnology, EVG’s key products include wafer bonding, thin-wafer processing and lithography/nanoimprint lithography (NIL) equipment, photoresist coaters, as well as cleaning and inspection/metrology systems.

EVGroup (EVG)

EVG 101 Advanced Resist Processing System
The EVG101 resist processing system performs R&D-type processes on a single chamber design, which is fully compatible with EVG’s automated systems. The EVG101 supports wafers up to 300 mm and can be configured for spin or spray coating and developing. Conformal layers of photoresist or polymers are achieved on 3D structured wafers for interconnection techniques with EVG’s advanced OmniSpray coating technology. This ensures low material consumption of precious high-viscosity photoresists or polymers while improving uniformity and resist spreading options.

EVG101

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EVGroup (EVG)

EVG101

Coaters & Developers

유사 등재물

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVG101

Coaters & Developers

유사 등재물

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101

EVGroup (EVG)

EVG101