개요

Wafer size 100mm ~ 200mm Flexible, Optimized Coating of MEMS with 3D Structures In production processes for MEMS, SAW and power devices, there has been an increasing requirement for improved handling of pattern formation and material coating of devices with 3D structures. To meet these market needs, Screen has developed the 80EX spray coater. The versatile 80EX supports a wide variety of uses ranging from research and development to large-scale production.