설명
설명 없음환경 설정
Process Atomosphere pressure CVD (BPSG) Wafer Size 200MM Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO <1> Enclosure 1. Door 2.Load window 3.Clean unit Spec. ULPA Filter (0.1μm) <2> Wafer Handrinｇ 1. Casette stage Stage# Casette x2, Dummy casette x1 Wafer size 5-8 inch combination 2. Cooling station 3. Wafer handring robot Function Back surface adsorption Alignment of orientation flat Model GENMARK GENCOBOT Ⅳ 4. Elevator Wafre guide size 8 inch 5. Index table Susceptor Material: SiC Guide ring Material: Quarts Heat shield Material: SUS Susceptor support Material: SUS Rotation table <3> Process gas supply 1. AFC box MFC Aera FC-782/781 Filter Pall GLF6101/GLFPF8101 Regulator Tescom 44-3200 Air operated valve Fujikin MEGA-ONE 2. Bubbling unit 3. Heat pipe <4> Other supply 1. Air supply Aux N2, Vac. Gen N2 2. Colling water <5> Process reaction 1. Disversion head (D/H) 2. Reactor heater <6> Exhaust 1. Enclosure exhaust damper 2. Reactor exhaust damper 3. Reactor exhaust pipe unit 4. Manometer unit General exhaust Process exhaust 5. Drain tank system Tank capacity 10 little 6. Ozone treatment machine Method Catalyst system 7. Rotary brush Method Brush up + Vacuum <7> Sub system 1. Ozonizer Model Sumitomo Seimitsu SGN-04CUA 2. Liquid source supply system Spec. TEOS, TMOP, TEB 3. Chillor unit Model NESLAB CFT-25 <8> Conrol & Electric equipment 1. User interface Computor, Display, Key board 2. System controller VME controller Robot controller Rotation controller Temperature controller 3. Maintenance PC IBM compatible 4. Electric equipment <9> Safety 1. Gas detection unit Model Shincosmos Electric V880 2. UPS Model CLARY UPS1-1.25k-1G 3. Interlock 4. EMO x4OEM 모델 설명
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CANON
APT-5800
검증됨
카테고리
CVD
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
18933
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
APT-5800
검증됨
카테고리
CVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
18933
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Process Atomosphere pressure CVD (BPSG) Wafer Size 200MM Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO <1> Enclosure 1. Door 2.Load window 3.Clean unit Spec. ULPA Filter (0.1μm) <2> Wafer Handrinｇ 1. Casette stage Stage# Casette x2, Dummy casette x1 Wafer size 5-8 inch combination 2. Cooling station 3. Wafer handring robot Function Back surface adsorption Alignment of orientation flat Model GENMARK GENCOBOT Ⅳ 4. Elevator Wafre guide size 8 inch 5. Index table Susceptor Material: SiC Guide ring Material: Quarts Heat shield Material: SUS Susceptor support Material: SUS Rotation table <3> Process gas supply 1. AFC box MFC Aera FC-782/781 Filter Pall GLF6101/GLFPF8101 Regulator Tescom 44-3200 Air operated valve Fujikin MEGA-ONE 2. Bubbling unit 3. Heat pipe <4> Other supply 1. Air supply Aux N2, Vac. Gen N2 2. Colling water <5> Process reaction 1. Disversion head (D/H) 2. Reactor heater <6> Exhaust 1. Enclosure exhaust damper 2. Reactor exhaust damper 3. Reactor exhaust pipe unit 4. Manometer unit General exhaust Process exhaust 5. Drain tank system Tank capacity 10 little 6. Ozone treatment machine Method Catalyst system 7. Rotary brush Method Brush up + Vacuum <7> Sub system 1. Ozonizer Model Sumitomo Seimitsu SGN-04CUA 2. Liquid source supply system Spec. TEOS, TMOP, TEB 3. Chillor unit Model NESLAB CFT-25 <8> Conrol & Electric equipment 1. User interface Computor, Display, Key board 2. System controller VME controller Robot controller Rotation controller Temperature controller 3. Maintenance PC IBM compatible 4. Electric equipment <9> Safety 1. Gas detection unit Model Shincosmos Electric V880 2. UPS Model CLARY UPS1-1.25k-1G 3. Interlock 4. EMO x4OEM 모델 설명
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