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마켓플레이스 > CVD > LAM RESEARCH / NOVELLUS > CONCEPT TWO "C2" SEQUEL EXPRESS

CONCEPT TWO "C2" SEQUEL EXPRESS

카테고리
CVD
개요

SEQUEL EXPRESS is an advanced version of the SEQUEL system designed to deposit Novellus’ CORAL family of low-k dielectric films, as well as all other advanced films required for 0.18-micron and smaller devices. With a throughput in excess of 110 wafers per hour, SEQUEL EXPRESS delivers up to 40 percent higher capital productivity.

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