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SEMVISION G10

카테고리
Defect Inspection
개요

The SEMVision G10 is a defect analysis system developed by Applied Materials. It integrates novel cold field emission (CFE) technology and offers industry-leading, sub-1nm resolution to address many of today’s challenges. This high resolution is a critical enabler for EUV photoresist review at >10x reduced eBeam dose.

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