중고 KLA SPECTRAFX 100 판매

설명

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환경 설정

Tool is already deinstalled and in warehouse. Tool was fully functional prior to deinstallation. Inspect to confirm configuration and condition of tool. Tool Model : SpectraShape 8660 Software version: 6.20.30.10105 System power rating: 208 AC 2 Phase Loading Configuration: 3 loaders (auto) Operating System: Microsoft Windows XP 1. Handler Unit 2. Metrology Unit No missing or damaged parts reported. <u>Note:</u> Unable to verify if tool's nameplate is present, and may pose an issue for shipment to China (CCIC) Need inspect to confirm.

OEM 모델 설명

SpectraFx 100 is KLA-Tencor’s next-gen thin film metrology solution that meets the process control requirements for 90nm devices, including 193nm DUV lithography processes. It supports next-gen and “operator-free” 300mm fabs with advanced automation and tool-to-tool matching capabilities, reducing process development time for advanced materials and accelerating their adoption into volume production. It also enables extensive product wafer monitoring and characterization required to accurately measure advanced thin films. It fully supports SEMI requirements for communication to automation tracks and materials process flow, delivering the precision, stability, and matching required for advanced thin film-measurement applications for 90nm device production. It achieves exceptional tool-to-tool matching and enables the use of a small spot size on product wafers, eliminating the use of monitor wafers.