2138
개요
The KLA-2138 is an inline wafer inspection system that uses ultra-broadband technology to detect a wide range of yield-relevant defects on all process layers at high speeds. It features improved brightfield optics, Segmented Auto Threshold technology, and an ultra-broadband illumination source for increased sensitivity and faster setup times. An integrated SMIF minienvironment is also available to streamline automation and reduce fab cleanliness requirements.
활성 등재물
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서비스
검사, 보험, 감정, 물류
상위 등재물
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