개요

The KLA / TENCOR 2351 is a Bright-Field Wafer Inspection System. The TENCOR 2351 can be used with 200mm wafer sizes. In July of 2001, an upgrade to the 2350 was introduced, the 2351, which offers enhancements in sensitivity, throughput and ease of use. The KLA 2135 is a wafer inspection system that detects all types of yield-relevant defects on all process layers with high capture rates. It has a two- to three-times throughput improvement over the earlier model KLA 2132 and uses advanced sensor and image processing technologies. The 2135 consistently detects the widest range of defects at the speeds required for high-volume wafer production.