설명

Brightfield inspection

환경 설정

KLA-Tencor, 2367, Bright Field Patterned Inspection, 300mm Missing PartsOEM Part NumberOEM DescriptionQTYStatus0076508-000TESTED,SDB1600MPX,V2 (Sensor Daughter Board)16Totally missing0279583-000FRU ASSY,AMPLIFER,STAGE,Z1Totally missing0093388-001TESTED,PSB3200MPX,BRD_B (DC to DC Board)1Totally missing730-774350-001CABLE,MAC-D TO X FLEX SIGNAL1Totally missing0086079-002TESTED,INPUT DATA ADAPTOR (IDA PCB) (Inside: 0101705-000)5Totally missing0031224-003ASSY,FILTER WHEEL,236X1Totally missing730-733835-001CABEL, MAC to MAC-D PWR1Totally missing730-772676-002CABEL, PNEUMATIC SOLENOID PIGTAIL1Totally missing0095782-000ASSY,FIBER OPTIC NODE #0 to #41Totally missing0095784-000ASSY,FIBER OPTIC NODE #2 to #61Totally missing0095785-000ASSY,FIBER OPTIC NODE #3 to #71Totally missing0095787-000ASSY,FIBER OPTIC NODE #4 to #81Totally missing0095789-000ASSY,FIBER OPTIC NODE #5 to #91Totally missing0095791-000ASSY,FIBER OPTIC NODE #6 to #101Totally missing0095792-000ASSY,FIBER OPTIC NODE #7 to #111Totally missing0103943-000ASSY, F.O, TDC 0 OUT, CRTA TO NODE #0-11Totally missing0103944-000ASSY, F.O, TDC 1 OUT, CRTA TO NODE #2-31Totally missing0103945-000Assy, SGB Out to RTAP1Totally missing0095216-000Net gear 24port net switch plus mounting bracket in UI box1Totally missing0115395-000Upper, Monitor (VDU) in UI 1Totally missing0119930-000G5 X-SERVER RTAP (Apple Image system) 1Totally missing0101705-000ASSY, TESTED, G5 X-SERVER NODE4Totally missing0276654-000FRU ASSY,TESTED POWER SUPPLY, M31 HOST/N2Totally missingPN UnknownTrackball mouse on UI unit (OEM PN unknown, cost about $900)1Totally missing0083821-000line conditioner (Mains Transformer)1Totally missing0298771-000Image Computer (Apple) Hard Disc3Dead / not recoverable0066560-000SCC DELL Computer Hard Disc6Dead / not recoverable

OEM 모델 설명

The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.