KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.

설명

환경 설정

OEM 모델 설명

문서

SP1 DLS

Defect Inspection

주요 품목 세부 정보

유사 등재물

SP1 DLS

Defect Inspection

주요 품목 세부 정보

설명

환경 설정

OEM 모델 설명

문서

유사 등재물

SP1 DLS

SP1 DLS

SP1 DLS

SP1 DLS