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PUMA 9500

카테고리
Defect Inspection
개요

The Puma 9500 Series narrowband inspection systems provide high performance excursion monitoring for the 32nm and below design nodes. It has twice the resolution and speed of previous-generation Puma laser imaging inspectors. It is part of a portfolio of advanced wafer defect inspection tools that accelerate the development and production ramp of leading-edge devices. It provides the sensitivity-at-throughput required to control critical yield excursions for a broad range of applications, including CMP, Etch, Lithography, and Films.

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