개요

The NSX-105 is an addition to the NSX Series, which includes the NSX-70, NSX-80, NSX-85, NSX-90 and NSX-95 models. In addition to whole wafer and film frame handling capabilities, the NSX-105 will also have 300mm wafer capability, which was introduced in 2001. This model will provide customers with a wider range of pricing and functionality options within the NSX Series.