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6" Fab For Sale from Moov - Click Here to Learn More
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CENTURA 5200 DPS R1

카테고리
Dry / Plasma Etch
개요

The Centura 5200 DPS R1 is a high-performance metal etch system introduced by Applied Materials1. It delivers high-productivity silicon, metal, and dielectric etch2. The system has two enhanced chambers: the DPS etch chamber and the ASP+ (advanced strip and passivation) module. The Centura 5200 DPS R1 system is designed for 150mm and 200mm or 8" wafer sizes.

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