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ILD-4100
개요
Anelva: ILD-4100 three-chamber cluster tool. Helicon wave source licensed from Plasma and Materials Technology (MORI source), can be configured with Helicon, RIE, and microwave downstream asher chambers, metal etch, poly etch processes.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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