개요

The 2300 Kiyo F is part of Lam’s Kiyo product family, which delivers high-performance capabilities for conductor etching in semiconductor devices. Conductor etch helps shape the electrically active materials used in the parts of a semiconductor device, and even a slight variation in these miniature structures can impact device performance. The Kiyo F series offers superior uniformity and repeatability, high productivity with low defectivity on multi-film stacks, improved critical dimension uniformity, atomic-scale variability control with production-worthy throughput, and upgradability for low cost of ownership over several device generations.