개요

Novyka family surface treatment, interface treatment and radical enhanced thermal treatment (RETTTM) systems provide unique solutions for critical surface treatment, interface control and materials modification capabilities, including damage free surface clean, selective surface treatment, and precise materials modification. As part of Atomic Surface EngineeringTM and Atomic Interface EngineeringTM product portfolio, Novyka family technologies address specific process integration requirements across advanced lithography, etch, clean, thin film and diffusion unit processes, and enable cutting-edge memory and logic semiconductor device scaling and specialty semiconductor device manufacturing.