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XACTIX CVE
개요
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
