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PRIMAXX MONARCH 3
개요
The Monarch 3 is a compact module includes a 3-wafer process chamber, and is designed for research laboratory and small volume production environments. Third generation process chamber has been designed for easy wafer size changes and maintenance Wafer loading options include a semi-automatic 3-wafer loader with load lock, and various cluster-based configurations
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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