NEXX Systems found in 2001. In 2012 Tokyo Electron acquired NEXX and renamed it TEL NEXX, Inc. In 2018 ASMPT acquired the company and renamed it ASM NEXX, Inc.
ASM NEXX is a worldwide leading supplier of metallization Advanced Packaging Deposition Equipment specializing in sputtering (PVD) and plating (ECD) processes.

ASM / TEL / NEXX

Stratus stands out as the top-tier solution for pattern plating and TSV applications, merging remarkable yield with cost-efficiency. Its ShearPlate technology simplifies process tuning, addressing the core challenges of production electrodeposition and ensuring unparalleled deposition uniformity. Catering to a range of applications from TSV to advanced packaging, Stratus' vertical design boasts up to 20 plating positions, guaranteeing high throughput and reduced maintenance. With its modular structure, Stratus is customizable to fit specific needs, available in two models - S200 and S300, and stands as the plating industry's gold standard for performance and adaptability.
ShearPlate technology ensures a uniform and thin fluid boundary layer, crucial for deposition uniformity and a wide chemical operating window in TSV and pattern plating. Stratus' vertical architecture, offering up to 20 metal plating positions, enables high throughput and system flexibility. Maintenance costs are minimized as Stratus requires only a single motion axis supported by magnetic bearings, unlike competing tools with multiple axes and mechanical bearings.

The modular architecture of Stratus allows for optimized system layouts tailored to specific process and throughput needs, from R&D to high-throughput production. It is available in two models, S200 (150/200 mm) and S300 (200/300 mm), each offering two configurations (FX with up to 10 plating cells and DX with up to 4 plating cells). Stratus sets the benchmark for performance, efficiency, and versatility in the plating industry."

ASM / TEL / NEXX

STRATUS S300

Electro Plating

유사 등재물

ASM / TEL / NEXX

STRATUS S300

ASM / TEL / NEXX

STRATUS S300

STRATUS S300

Electro Plating

유사 등재물

ASM / TEL / NEXX

STRATUS S300

ASM / TEL / NEXX

STRATUS S300