Designed, developed & manufactured high performance and precision chemical processing equipment. Products included electrochemical deposition systems for electroplating copper, gold, solder and other metals; surface preparation systems for cleaning, stripping and etching silicon wafers; and wafer transport container cleaning systems.

SEMITOOL

Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.

EQUINOX

SEMITOOL

EQUINOX

Electro Plating

유사 등재물

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

EQUINOX

Electro Plating

유사 등재물

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX

SEMITOOL

EQUINOX