설명
설명 없음환경 설정
- 4 Plating Chambers - 2 Preclean / SRD Chambers - Genmark Radial Robot - 1 Tank Ultrasonic Level Sensor - ARU Interface - Levitronix Pumps - Surpass Flow Meters - Pall 10” Filter Housings (Plating Cells) - Pall 4” Filter (Prewet Tank) - Sample Port - Fire Suppression System - Chemical Bulk Fill - Dynatronix Pro Series Plating Power Supply (4-Cell) - Tank Heat Exchange Connections - Power: 208VAC, 80A, 50/60HzOEM 모델 설명
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.문서
문서 없음
SEMITOOL
EQUINOX
검증됨
카테고리
Wet processing
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
18604
웨이퍼 사이즈:
6"/150mm
빈티지:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
SEMITOOL
EQUINOX
검증됨
카테고리
Wet processing
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
18604
웨이퍼 사이즈:
6"/150mm
빈티지:
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
- 4 Plating Chambers - 2 Preclean / SRD Chambers - Genmark Radial Robot - 1 Tank Ultrasonic Level Sensor - ARU Interface - Levitronix Pumps - Surpass Flow Meters - Pall 10” Filter Housings (Plating Cells) - Pall 4” Filter (Prewet Tank) - Sample Port - Fire Suppression System - Chemical Bulk Fill - Dynatronix Pro Series Plating Power Supply (4-Cell) - Tank Heat Exchange Connections - Power: 208VAC, 80A, 50/60HzOEM 모델 설명
Equinox is a single wafer, multi-chamber process platform for cassette-to-cassette cleaning, etching, developing, and electroplating. It offers configurations from one to six chambers with a centralized controller and robotics. The platform is capable of performing various processes on substrates ranging from 3" to 200mm in size. It works by using a central dual end-effector robot to transfer substrates from cassette to chamber and back again. Equinox can help automate manual steps and transfers while increasing throughput with a small footprint. It offers ultra-clean dry-to-dry operation with uniform plating and etching results. The platform can integrate sequential process steps with a low cost of ownership (CoO) and provides a migration path from small R&D platforms to production systems with the same process chambers and control features.문서
문서 없음