Lam Research is a leading supplier of plasma etch- and single-wafer clean equipment that plays a pivotal role in defining the features and capabilities of next-generation semiconductor devices. With the addition of Novellus' innovative thin-film deposition and surface preparation product lines, the new Lam Research is well-positioned within the industry to support critical technology transitions including 3D structures in advanced logic and NAND memory, as well as the scaling to 450 mm wafers.

LAM RESEARCH / NOVELLUS

The SABRE Extreme, an advanced Electrofill system that has been qualified at 45 nanometers and has demonstrated fill at 32 nanometers. The SABRE Extreme incorporates a number of technological innovations for advanced manufacturing applications, including advanced wafer entry control for thin seed layers (< 200A), tunable profile control for improved uniformities, and the capability to plate on non-copper seed materials.

LAM RESEARCH / NOVELLUS

SABRE EXTREME

Electro Plating

유사 등재물

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME

SABRE EXTREME

Electro Plating

유사 등재물

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME

LAM RESEARCH / NOVELLUS

SABRE EXTREME