설명
DIC DIC Calibrations Gem/SECS(comm port) Gem/SECS(HSMH) Oblique XY coordinates환경 설정
Install Type: Bulkhead System / ASYST LPT 2200 SW: Envision Mainframe: TCP9600 SE (CFE) WVDS On-Board AC Dist On-Board RF Generators: (3) Onboard AE RFG 1250 SECS Interface Main Process Module (PM1): TCP 9600SE Wafer Clamp: ESC w/He Cooling Electrode Gap:Fixed gap amp, TCP Coil, Turbo 1000 Seiko Seiki incl controller Gate Valve: VAT 64 Heated Pump Stack; Manifold; Endpoint Detection: Dual Photo diode; EndpointWavelength(s): 703nm and 261.8nm; PM2: Hinged DSQ Stripper; Gas Box Config; Orbitally Welded Gas Box, Backside Helium Cooling, Gas Line 1 2 4 5 6 7 8, Gas Flow (sccm), Cl2 100, BCL3 100, CH4 10, N2 10, O2 200, O2 500, H20 500 Power Requirements: 208V, 80A, 3-Phase, Freq 50/60HzOEM 모델 설명
미제공문서
문서 없음
NIDEC SANKYO
SR8220-019
검증됨
카테고리
Electronic Test
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
23790
웨이퍼 사이즈:
알 수 없음
빈티지:
2008
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기유사 등재물 없음
NIDEC SANKYO
SR8220-019
검증됨
카테고리
Electronic Test
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
23790
웨이퍼 사이즈:
알 수 없음
빈티지:
2008
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
DIC DIC Calibrations Gem/SECS(comm port) Gem/SECS(HSMH) Oblique XY coordinates환경 설정
Install Type: Bulkhead System / ASYST LPT 2200 SW: Envision Mainframe: TCP9600 SE (CFE) WVDS On-Board AC Dist On-Board RF Generators: (3) Onboard AE RFG 1250 SECS Interface Main Process Module (PM1): TCP 9600SE Wafer Clamp: ESC w/He Cooling Electrode Gap:Fixed gap amp, TCP Coil, Turbo 1000 Seiko Seiki incl controller Gate Valve: VAT 64 Heated Pump Stack; Manifold; Endpoint Detection: Dual Photo diode; EndpointWavelength(s): 703nm and 261.8nm; PM2: Hinged DSQ Stripper; Gas Box Config; Orbitally Welded Gas Box, Backside Helium Cooling, Gas Line 1 2 4 5 6 7 8, Gas Flow (sccm), Cl2 100, BCL3 100, CH4 10, N2 10, O2 200, O2 500, H20 500 Power Requirements: 208V, 80A, 3-Phase, Freq 50/60HzOEM 모델 설명
미제공문서
문서 없음
유사 등재물
모두 보기유사 등재물 없음