개요

The theta-SE is a fully integrated spectroscopic ellipsometer designed for efficient and accurate measurement of film thickness and optical properties. With features such as 300 mm sample mapping, a small-spot measurement beam, fast sample alignment, a look-down camera, and the latest Dual-Rotation ellipsometer technology, it provides everything needed for spatial uniformity assessment. Its high-speed capabilities, including fast point-to-point translation and continuous data collection through Dual-Rotation ellipsometer technology, optimize sample throughput. Despite its powerful features, the theta-SE remains compact, thanks to the patented Dual-Theta rotation stage, allowing full 300 mm mapping in a small, table-top instrument with a footprint just slightly larger than a 300 mm wafer. User-friendly automation, along with built-in reporting, ensures easy operation with quick access to measurement results. Moreover, the theta-SE offers affordability without compromising on the power of spectroscopic ellipsometry and 300 mm uniformity mapping.