설명
설명 없음환경 설정
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitrideOEM 모델 설명
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.문서
문서 없음
KLA / SPTS
VERSALIS fxP
검증됨
카테고리
Etch/Asher
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
75494
웨이퍼 사이즈:
8"/200mm
빈티지:
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
VERSALIS fxP
카테고리
Etch/Asher
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
75494
웨이퍼 사이즈:
8"/200mm
빈티지:
2018
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitrideOEM 모델 설명
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.문서
문서 없음