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LPX APS
카테고리
Etch/Asher개요
SPTS LPX APS is a wafer processing system designed for research and development applications in the semiconductor industry. It combines a manually loaded, single-wafer vacuum load-lock with SPTS's etch or deposition plasma sources, providing a cost-effective platform for R&D purposes.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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