개요

"The 9600 Compressor is a universal compressor that accepts three-phase 50Hz or 60 Hz power input and provides two-phase or threephase 60Hz power output to On-Board or Cryo-Torr Cryopumps. The 9600 Compressor design eliminates the use of three-phase motor controllers and/or frequency converters and significantly reduces the amount of equipment required and cost associated with the Cryopump power circuit."