개요

AERIS-G PLASMA ABATEMENT SYSTEM The Aeris-G system can be installed within the pump footprint of each chamber. Ideal for existing tool installations, it easily fits into existing exhaust lines and requires only power, nitrogen, cooling water and ultrapure water connections. For new tool installations, Aeris-G saves subfab space, reduces utility and exhaust connections, and minimizes installation costs while improving abatement efficiency.