개요

The CVS300 is a cutting-edge vertical furnace designed for 300 mm oxidation, diffusion, annealing, and LPCVD applications. It can operate in either full or semi-automatic mode, meeting the requirements of 300 mm technology. The system features a 300mm vertical furnace for atmospheric processing, a 770mm flatzone with five heating zones, and an active loading door insulation. It also boasts a metal-free process chamber (patent pending), an active controlled ramp down cooling system, and an intelligent and easily expandable temperature controller. The process boat allows for the simultaneous use of 300 mm and 200 mm wafers. The system also includes a semi- or full-automatic wafer handling system, a quartz design for low COO and easy service, a standard field bus component control (DeviceNet, CANOpen), a water-cooled heating cassette, and a service rail for process tube and heating cassette change. It is highly serviceable for short MTTR and efficiently uses cleanroom space due to its smart design.