개요

LCT Series • LCT Poly / LCT SiN: Configured with specific gas delivery lines for Low-Pressure Chemical Vapor Deposition (LPCVD) of Polysilicon or Silicon Nitride. • LCT Oxide / LCT Oxide-AL: Built with torch or steam systems specifically for thermal oxidation. • LCT Anneal: Configured with inert gas flows (like N₂ or H₂/N₂ forming gas) for high-temperature annealing.