설명
Furnace (FTPS), host station Installed for ONO gate capability, process gases run under engineering.환경 설정
-Base unit ONO process. -Type I deep bay frame -Waves controller -Wafer Diameter: 200 mm -Load: 170 slot boat (150 wfr load size) with boat rotaNon -Heater element: 500C – 1000C -Process gases: NH3, DCS, N2O, N2OEM 모델 설명
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.문서
문서 없음
카테고리
Furnaces / Diffusion
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Refurbished
작동 상태:
알 수 없음
제품 ID:
91212
웨이퍼 사이즈:
6"/150mm, 8"/200mm
빈티지:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
TEL / TOKYO ELECTRON
ALPHA-8SE
카테고리
Furnaces / Diffusion
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Refurbished
작동 상태:
알 수 없음
제품 ID:
91212
웨이퍼 사이즈:
6"/150mm, 8"/200mm
빈티지:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Furnace (FTPS), host station Installed for ONO gate capability, process gases run under engineering.환경 설정
-Base unit ONO process. -Type I deep bay frame -Waves controller -Wafer Diameter: 200 mm -Load: 170 slot boat (150 wfr load size) with boat rotaNon -Heater element: 500C – 1000C -Process gases: NH3, DCS, N2O, N2OEM 모델 설명
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.문서
문서 없음