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TEL / TOKYO ELECTRON TELFORMULA
  • TEL / TOKYO ELECTRON TELFORMULA
  • TEL / TOKYO ELECTRON TELFORMULA
설명
설명 없음
환경 설정
-300 mm Production with Max production 50 Pcs -2 IO Port ,12 Carrier Stock -Waves System CTL , Temp CTL M780 -Heater Type : VCM series , -Fork Transfer with 5+1 -2 Boat -Gas :N2, SiH4 ,1%PH3/He ,20%F2/N2, H2, O2
OEM 모델 설명
TELFORMULA is an advanced thermal processing system designed for the production of 65 to 45-nm-node-generation devices and beyond. It offers a reasonable Cost of Ownership (CoO), a short cycle time, and significantly improved process performance. Some of its key features include an ultra-clean, all-quartz reactor, state-of-the-art heater element technology, high-speed wafer-transfer robotics, and in-situ dry gas cleaning technology. TELFORMULA has a wide range of applications, including radical oxidation (LPRO), ultra-thin gate dielectrics formation (oxidation, nitridation), LPCVD (supporting Poly, Sin, SiO2 / Dry gas cleaning), ultra-low temperature LPCVD, and high-k film formation (AIO, HfO, AIO / HfO, HfSiO). With its advanced technology and versatile capabilities, TELFORMULA is an optimal choice for thermal processing in the semiconductor industry.
문서

문서 없음

카테고리
Furnaces / Diffusion

마지막 검증일: 60일 이상 전

주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

65731


웨이퍼 사이즈:

12"/300mm


빈티지:

2009


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기

TEL / TOKYO ELECTRON

TELFORMULA

verified-listing-icon
검증됨
카테고리
Furnaces / Diffusion
마지막 검증일: 60일 이상 전
listing-photo-7d3a8d241da545958fe3f490214cc9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51676/7d3a8d241da545958fe3f490214cc9be/d5f7baecb67941de9a1565c3ac6b9712_ef456d789f164b45a0eb2f1da3fac429_mw.png
listing-photo-7d3a8d241da545958fe3f490214cc9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51676/7d3a8d241da545958fe3f490214cc9be/c1a0996114c84a8081d7d345c10222fa_508f7b8a77434d5cb4f4ec04320575c51201a_mw.jpeg
주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

65731


웨이퍼 사이즈:

12"/300mm


빈티지:

2009


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음
환경 설정
-300 mm Production with Max production 50 Pcs -2 IO Port ,12 Carrier Stock -Waves System CTL , Temp CTL M780 -Heater Type : VCM series , -Fork Transfer with 5+1 -2 Boat -Gas :N2, SiH4 ,1%PH3/He ,20%F2/N2, H2, O2
OEM 모델 설명
TELFORMULA is an advanced thermal processing system designed for the production of 65 to 45-nm-node-generation devices and beyond. It offers a reasonable Cost of Ownership (CoO), a short cycle time, and significantly improved process performance. Some of its key features include an ultra-clean, all-quartz reactor, state-of-the-art heater element technology, high-speed wafer-transfer robotics, and in-situ dry gas cleaning technology. TELFORMULA has a wide range of applications, including radical oxidation (LPRO), ultra-thin gate dielectrics formation (oxidation, nitridation), LPCVD (supporting Poly, Sin, SiO2 / Dry gas cleaning), ultra-low temperature LPCVD, and high-k film formation (AIO, HfO, AIO / HfO, HfSiO). With its advanced technology and versatile capabilities, TELFORMULA is an optimal choice for thermal processing in the semiconductor industry.
문서

문서 없음

유사 등재물
모두 보기