개요

-Electrical requirements (ACV×φ×Hz) 200×3×50 220×3×60 -Power (KW)(50/60Hz) 5.2/6.5 -Cooling method Water flow rate (L/min)(20℃) 5.5 -Weight (Kg) 121 -Adsober replacement cycle 24,000 hours **Cooling water inlet/outlet Rc 3/8 *C30PMVRT run multiple cryopumps.