개요

500nm resolution and <70nm alignment accuracy. Set up for 4” wafers but convertible to 3” or 6” platforms. 21mm x 21mm field size. 1.3µm depth of focus. The PAS 5500/80B was introduced as a wide-field production stepper belonging to the then most advanced and productive stepper family in the world. Its half micron imaging, precise pattern overlay, industry leading throughput and overall versatility of the PAS 5500/80B made it an ideal production stepper for manufacturing multiple generations of DRAMs, ASICs, and Microprocessors. The PAS 5500/80 is still in use in fabs around the world as a volume production tool for non-critical layers.