개요

The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job: to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency while delivering industry-leading cleanliness with the lowest particle levels. Ease of set-up and serviceability are key attributes of the Spartan Sorter. Its simple, scalable architecture is easy to service and maintain. Fully compliant with SEMI standards, the Spartan Sorter is available in several options to support various sorting applications.