개요

The Helios NanoLab 460HP is a high-performance imaging and analysis platform that can accurately locate defects in repetitive structures using FEI’s Cell Navigator-based automatic sample navigation. This can improve the success rate of finding the target region of interest by more than 5%. The platform also features a patented reverse TEM sample preparation method based on FEI’s EasyLift EX Nanomanipulator, QuickFlip shuttle, and iFast automated software platform, providing the highest throughput in the industry. With higher material contrast based on the new low-loss penetrating detector and ultra-high-resolution SEM imaging at low voltages, the Helios NanoLab 460HP ensures accurate endpoint detection, improving yield during final thinning of TEM samples. The combination of these unique features can ultimately increase TEM lamella sample throughput by more than 30% compared to the Helios NanoLab 450.