개요

The Helios NanoLab 400S is a DualBeam system from FEI that integrates both ion and electron beams for FIB (Focused Ion Beam) and SEM (Scanning Electron Microscopy) functionality in one machine. This allows users to switch between the two beams for quick and accurate navigation and milling. The convergence of the SEM and FIB at short working distance enables precision “slice-and-view” cross-sectioning and analysis at high resolution.