개요

IM4000 features a removable specimen holder that allows for both cross-section milling, where the ion beam irradiates the specimen from above and cuts a planar cross section through the specimen along the edge of a mask located between the specimen and ion gun, and flat milling, where a wide and smooth surface of approximately 5mm in diameter is achieved by shifting the ion beam axis and specimen rotational axis, and irradiating the specimen from an angle between 30–80°. The IM4000 also features a high milling rate ion gun with a processing speed of 300µm/hr (3 times faster than previous models**) that dramatically reduces the time required for time-consuming cross-section milling.