개요

The MLA 100 Maskless Aligner features an intuitive user interface, a simple loading procedure, and advanced, reliable technology. The MLA100 has extreme exposure speed. In less than 10 minutes, an area 100×100 mm² with structures as small as 1 micron can be exposed. Alignment in multi-layer applications can also be achieved quickly as the product’s three integrated cameras with varying resolutions enable alignment to be obtained within 2 minutes.