PROLITH X5
카테고리
Lithography개요
PROLITH X5 provides simulation capability for all lithography technologies with particular emphasis on 193nm immersion lithography, spacer-based Self-Aligned Double Patterning ("SADP") and thick resist lithography for 3-D interconnects and MEMS manufacturing.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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