nB5
카테고리
Lithography개요
Round-beam vector-scan system using a step-and- repeat method for nanopatterning, and has been specially designed for mix-and-match lithography. Specification: Beam Voltage range 20kV - 100kV Feature size on resist <8nm Stitching/overlay error <25nm for 500um field Automatic loading 5 chuck airlock system
활성 등재물
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서비스
검사, 보험, 감정, 물류
상위 등재물
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