e-LiNE
카테고리
Lithography개요
he Raith e-LiNE is an electron beam lithography tool which utilizes thermal field emission filament technology and a laser-interferometer controlled stage. The system is equipped with a load lock, an automatic height laser sensor, and both In-lens and SE2 detectors.
활성 등재물
1
서비스
검사, 보험, 감정, 물류
