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설명
Medium Current Implant환경 설정
Software Version: 1.7.0.4.DP14 CIM: GEM Process: Implant Config Attached.OEM 모델 설명
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.문서
유사 등재물
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AXCELIS
OPTIMA MD
카테고리
Low Current
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
94910
웨이퍼 사이즈:
12"/300mm
빈티지:
2006
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